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US Patent 10714385 Selective deposition of tungsten

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

Date of Patent

July 14, 2020

Patent Application Number

15615489

Date Filed

June 6, 2017

Patent Citations

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US Patent 10032628 Source/drain performance through conformal solid state doping

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Patent Citations Received

US Patent 11501965 Plasma enhanced deposition processes for controlled formation of metal oxide thin films

US Patent 11377733 Fluorine-free tungsten deposition process employing in-situ oxidation and apparatuses for effecting the same

US Patent 11918715 Polarized LED filtration system

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