US Patent 10727119 Process integration approach of selective tungsten via fill
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Patent Number
107271190
Date of Patent
July 28, 2020
0Patent Application Number
162521000
Date Filed
January 18, 2019
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Patent Number
107271190
Date of Patent
July 28, 2020
0Patent Application Number
162521000
Date Filed
January 18, 2019
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Patent Primary Examiner
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US Patent 10727119 Process integration approach of selective tungsten via fill
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10727119
Date of patent
July 28, 2020
Patent application number
16252100
Date Filed
January 18, 2019
Patent citations
Patent primary examiner
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