US Patent 10734268 Modularity of Tec-Cell, FOUP and substrate containers and carriers
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US Patent 10734268 Modularity of Tec-Cell, FOUP and substrate containers and carriers
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Patent applicant
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Patent jurisdiction
Patent number
10734268
Date of patent
August 4, 2020
Patent application number
16117278
Date Filed
August 30, 2018
Patent citations
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