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US Patent 10741799 Method for forming a stack and stack

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United States Patent and Trademark Office

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Patent Number

Date of Patent

August 11, 2020

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Patent Application Number

164686660

Date Filed

November 30, 2017

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Patent Citations

US Patent 10032913 Contact structures, FinFET devices and methods of forming the same

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US Patent 10170336 Methods for anisotropic control of selective silicon removal

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