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US Patent 10752991 Half-angle nozzle
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Patent
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Date Filed
January 22, 2018
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Date of Patent
August 25, 2020
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Patent Applicant
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Patent Application Number
15877048
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Patent Citations Received
US Patent 11634813 Half-angle nozzle
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US Patent 10982325 Fluid distributing device for a thin-film deposition apparatus, related apparatus and methods
US Patent 11032945 Heat shield assembly for an epitaxy chamber
US Patent 11501954 Dogbone inlet cone profile for remote plasma oxidation chamber
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10752991
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Patent Primary Examiner
Rudy Zervigon
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