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US Patent 10755897 Plasma processing apparatus and plasma processing method

Patent 10755897 was granted and assigned to Hitachi on August, 2020 by the United States Patent and Trademark Office.

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Edits on 8 May, 2024
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Patent Citations Received
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US Patent 11978612 Plasma processing apparatus
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edited on 22 May, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=107558970
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Infobox
Patent Citations Received
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US Patent 11424105 Plasma processing apparatus
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Infobox
Is a
Patent
Patent
0
Patent Applicant
Hitachi
Hitachi
0
Current Assignee
Hitachi
Hitachi
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
107558970
Date of Patent
August 25, 2020
0
Patent Application Number
161186960
Date Filed
August 31, 2018
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=107558970
Patent Citations
‌
US Patent 10090162 Plasma processing method and plasma processing device
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US Patent 10217611 Plasma processing apparatus and plasma processing method
0
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US Patent 10381198 Plasma processing apparatus and plasma processing method
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Patent Citations Received
‌
US Patent 11424105 Plasma processing apparatus
0
Patent Primary Examiner
‌
Lan Vinh
0
Edits on 24 Aug, 2022
"update inverses"
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Golden AI
edited on 24 Aug, 2022
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
‌
US Patent 11424105 Plasma processing apparatus
Edits on 8 Jun, 2022
"Entity importer update"
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Golden AI
edited on 8 Jun, 2022
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Infobox
Website URL
https://pdfpiw.uspto.gov/.piw?Docid=10755897
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 US Patent 10755897 Plasma processing apparatus and plasma processing method

Infobox
Is a
Patent
Patent
Patent applicant
Hitachi
Hitachi
Current assignee
Hitachi
Hitachi
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
10755897
Date of patent
August 25, 2020
Patent application number
16118696
Date Filed
August 31, 2018
Patent citations
‌
US Patent 10090162 Plasma processing method and plasma processing device
‌
US Patent 10217611 Plasma processing apparatus and plasma processing method
‌
US Patent 10381198 Plasma processing apparatus and plasma processing method
Patent primary examiner
‌
Lan Vinh

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