US Patent 10755900 Multi-layer plasma erosion protection for chamber components
Patent 10755900 was granted and assigned to Applied Materials on August, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 27, 2018
Date of Patent
August 25, 2020
Patent Applicant
Patent Application Number
15965794
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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