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US Patent 10755941 Self-limiting selective etching systems and methods
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Patent
Current Assignee
Applied Materials
Date Filed
July 6, 2018
Date of Patent
August 25, 2020
Patent Applicant
Applied Materials
Patent Application Number
16028671
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•••
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
10755941
Patent Primary Examiner
Stephanie P Duclair
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