US Patent 10763071 Compact high energy ion implantation system
Patent 10763071 was granted and assigned to Varian Semiconductor Equipment Associates on September, 2020 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 1, 2018
Date of Patent
September 1, 2020
Patent Applicant
Patent Application Number
15995913
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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