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US Patent 10790353 Semiconductor device with superjunction and oxygen inserted Si-layers

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United States Patent and Trademark Office

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Date of Patent

September 29, 2020

Patent Application Number

16185610

Date Filed

November 9, 2018

Patent Citations

US Patent 10573742 Oxygen inserted Si-layers in vertical trench power devices

Patent Primary Examiner

Vongsavanh Sengdara

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