US Patent 10811231 Plasma processing apparatus and plasma processing method
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108112310
Date of Patent
October 20, 2020
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162289340
Date Filed
December 21, 2018
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Patent Number
108112310
Date of Patent
October 20, 2020
0Patent Application Number
162289340
Date Filed
December 21, 2018
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US Patent 10811231 Plasma processing apparatus and plasma processing method
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
10811231
Date of patent
October 20, 2020
Patent application number
16228934
Date Filed
December 21, 2018
Patent citations
Patent primary examiner
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