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US Patent 10823913 Optical switch controllable by vertical motion MEMS structure
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Patent
Date Filed
September 27, 2019
Date of Patent
November 3, 2020
Patent Application Number
16586098
Patent Citations
US Patent 10677594 Microelectromechanical system (MEMS) device readout with optical directional coupler
Patent Citations Received
US Patent 11977281 Integrated photonic component for enhanced mode overlap of a 2D phase shifter
0
US Patent 11754785 Methods and apparatuses for optical mode conversion
US Patent 11340399 In-plane MEMS optical switch
0
US Patent 11360270 MEMS optical switch with stop control
US Patent 11681104 Photonic switch with a cantilever coupler
0
US Patent 11300852 MEMS optical switch with a cantilever coupler
0
US Patent 11307483 MEMS optical switch with dual cantilever couplers
US Patent 11754683 Pseudo monostatic LiDAR with two-dimensional silicon photonic mems switch array
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
10823913
Patent Primary Examiner
Eric Wong
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