Patent 10883967 was granted and assigned to TAIYO YUDEN CO., LTD on January, 2021 by the United States Patent and Trademark Office.
A gas detection element includes a crystal oscillator and a gas adsorption film formed on the crystal oscillator. The gas adsorption film has a thickness that causes the detection element to have a crystal impedance of no more than 10 times the crystal impedance of the crystal oscillator on which the gas adsorption film is not formed. A resonance frequency variation of the gas detection element due to humidity variation can be kept within a certain range.