US Patent 10887973 High brightness laser-produced plasma light source
Is a
Date Filed
January 27, 2020
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Date of Patent
January 5, 2021
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Patent Application Number
16773240
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Patent Citations Received
Patent Inventor Names
Denis Aleksandrovich Glushkov
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Vladimir Vitalievich Ivanov
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Vyacheslav Valerievich Medvedev
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Yury Viktorovich Sidelnikov
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Aleksandr Andreevich Lash
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Aleksandr Yurievich Vinokhodov
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Konstantin Nikolaevich Koshelev
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Mikhail Sergeyevich Krivokorytov
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Oleg Borisovich Khristoforov
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Oleg Feliksovich Yakushev
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Patent Primary Examiner
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