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US Patent 10901321 Strip process for high aspect ratio structure
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Patent
Date Filed
March 18, 2020
Date of Patent
January 26, 2021
Patent Application Number
16822747
Patent Citations Received
US Patent 11942332 Methods of etching metal-containing layers
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
10901321
Patent Primary Examiner
Mikhail Kornakov
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