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US Patent 10903422 Vertically oriented memory structure

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Contents

Is a
Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10903422
Date of Patent
January 26, 2021
Patent Application Number
16381406
Date Filed
April 11, 2019
Patent Citations
‌
US Patent 10056331 Programmable via devices with metal/semiconductor via links and fabrication methods thereof
‌
US Patent 10096655 Three dimensional memory array
Patent Citations Received
‌
US Patent 11957069 Contact resistance of a metal liner in a phase change memory cell
0
Patent Primary Examiner
‌
Dung A. Le
Patent abstract

A method for fabricating a semiconductor device including a vertically oriented memory structure includes forming at least one pillar including phase-change memory (PCM) material on at least one electrode, forming a plurality of spacers on the electrode and along sidewalls of the pillar, and forming, by processing the plurality of spacers and the pillar, a modified pillar having a vertically oriented dumbbell shape associated with a vertically oriented PCM memory structure.

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