Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
January 26, 2021
Patent Application Number
16381406
Date Filed
April 11, 2019
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for fabricating a semiconductor device including a vertically oriented memory structure includes forming at least one pillar including phase-change memory (PCM) material on at least one electrode, forming a plurality of spacers on the electrode and along sidewalls of the pillar, and forming, by processing the plurality of spacers and the pillar, a modified pillar having a vertically oriented dumbbell shape associated with a vertically oriented PCM memory structure.
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