Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Shinichi Watanuki0
Tohru Kawai0
Yasutaka Nakashiba0
Date of Patent
February 16, 2021
0Patent Application Number
166813720
Date Filed
November 12, 2019
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor device includes a substrate having a first surface and a second surface that have top and back relation, an insulating layer formed on the first surface of the substrate, and an optical waveguide formed on the insulating layer and formed of a semiconducting layer. A first opening is formed on the second surface of the substrate. The first opening overlaps the optical waveguide in plan view.
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