Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
February 16, 2021
Patent Application Number
16515779
Date Filed
July 18, 2019
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
Structures for a grating coupler and methods of fabricating a structure for a grating coupler. A silicide layer is formed on a patterned section of a semiconductor layer. The grating structures of a grating coupler are formed over the silicide layer and the section of the semiconductor layer.
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