Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Takashi Shigeta0
Munekazu Komiya0
Toshihiro Kawai0
Yasushi Taniyama0
Date of Patent
February 16, 2021
0Patent Application Number
157575600
Date Filed
August 19, 2016
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
There is provided a gas injection device configured to prevent entry of atmospheric air when charging gas into a FOUP. In order to realize such a gas injection device, the gas injection device is structured so as to include: a gas supply port 72 through which inert gas is supplied; a nozzle main body 71 including a gas passage 77 communicating with the gas supply port 72; an opening/closing mechanism 92 configured to close the gas supply port 72; and an opener 96 configured to cause the opening/closing mechanism 92 to open the gas supply port 72 closed by the opening/closing mechanism 92.
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