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US Patent 10930563 Formation of stacked nanosheet semiconductor devices

OverviewStructured DataIssuesContributors
Is a
Patent
Patent
Date Filed
January 7, 2020
Date of Patent
February 23, 2021
Patent Application Number
16735826
Patent Citations
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US Patent 10388569 Formation of stacked nanosheet semiconductor devices
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US Patent 10236217 Stacked field-effect transistors (FETs) with shared and non-shared gates
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US Patent 10483166 Vertically stacked transistors
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US Patent 10096607 Three-dimensional stacked junctionless channels for dense SRAM
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US Patent 10192867 Complementary FETs with wrap around contacts and method of forming same
Patent Citations Received
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US Patent 11837604 Forming stacked nanosheet semiconductor devices with optimal crystalline orientations around devices
9
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
10930563
Patent Primary Examiner
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Allan R. Wilson
Industry
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