Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ryoichi Suzuki0
Toshihiko Mutsuji0
Hideki Nakamura0
Takashi Nauchi0
Date of Patent
February 23, 2021
0Patent Application Number
160631550
Date Filed
December 15, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In conventional fluid discharge devices, a discharge head used should be increased in size according to increase in size of a workpiece such as silicon wafer. However, if the discharge head increases in length, a deformation amount of a mask used for discharging the fluid on the workpiece increases, thereby the discharging amount varies. Discharging the fluid in a reciprocating manner is performed using a fluid discharging device including a head unit having a width shorter than a length of the workpiece. A suction port having opening portions each having a slit shape are disposed on the both sides of the discharge nozzle in a vicinity of the discharge nozzle.
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