Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 2, 2021
Patent Application Number
16033485
Date Filed
July 12, 2018
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present application discloses forming self-assembled monolayers (SAMs) by exposing the substrate at least twice to SAM precursors with intervening cooling of a substrate.
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