Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Marcus Antonius Verschuuren0
Remco Van Brakel0
Date of Patent
March 16, 2021
0Patent Application Number
144431810
Date Filed
December 13, 2013
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Disclosed is a silane-based composition for forming an imprinting ink for imprint lithography applications in which the crosslinking of the silanes in the composition is suppressed by the inclusion of a compound of Formula 3: wherein R9 is selected from the group consisting of C1-C6 linear or branched alkyl groups and a phenyl group, and wherein n is a positive integer having a value of at least 2. An ink may be formed by adding a PAG, photoinitiator or TAG to the composition such upon their activation, the crosslinking reaction is completed. An imprinting method using 10 such an ink is also disclosed.
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