Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 16, 2021
Patent Application Number
16111083
Date Filed
August 23, 2018
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
Embodiments of the present disclosure provide a transfer device, a curing system with the transfer device and a curing method using the curing system. The transfer device includes: a mount; a rotary stage mounted to the mount and configured to be rotatable about a first axis; and a rotary table mounted to the rotary stage and configured to be rotatable about a second axis.
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