Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 16, 2021
Patent Application Number
16549028
Date Filed
August 23, 2019
Patent Citations Received
Patent Primary Examiner
Patent abstract
A sample inspection apparatus irradiates a sample with a conical shell of X-ray or similar radiation generating a plurality of Debye rings originating from a circular path on the sample. The apparatus is provided with two detectors. A first detector receives diffracted radiation and a second detector receives radiation which is transmitted through a coded aperture provided at a detection surface of the first detector.
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