Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
March 16, 2021
Patent Application Number
16499654
Date Filed
April 4, 2017
Patent Citations Received
Patent Primary Examiner
Patent abstract
An atmospheric pressure plasma device including a plasma head; a gas tube configured to supply a gas to the plasma head; a flow rate controller configured to control a flow rate of the gas supplied to the gas tube; a pressure sensor arranged downstream of the flow rate controller and configured to detect a pressure in the gas tube; and a determining section configured to determine a state of the device based on how the pressure in the gas tube deviates from a standard value specified for each flow rate of the supplied gas. As a result, it is possible to determine the gas leakage of the atmospheric pressure plasma device. Further, it is possible to determine whether plasma is being generated in a favorable state.
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