US Patent 10950428 Method for processing a workpiece
All edits
Edits on 5 Jun, 2024
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Patent Citations Received
Edits on 12 Dec, 2023
Golden AI
Edits made to:
Article (+495 characters)
Article
Patent abstract
Processes for providing nitridation on a workpiece, such as a semiconductor, are provided. In one example implementation, a method can include supporting a workpiece on a workpiece support. The method can include exposing the workpiece to species generated from a capacitively coupled plasma to provide nitridation on the workpiece. The method can also include exposing the workpiece to species generated form an inductively coupled plasma to provide nitridation on the workpiece.
Edits on 9 Oct, 2023
Golden AI
Edits made to:
Infobox (+5 properties)
Infobox
Patent Inventor Names
Hua Chung0
Michael X. Yang0
Shawming Ma0
Ting Xie0
Xinliang Lu0
Edits on 26 May, 2023
Golden AI
Edits made to:
Infobox (-1 properties)
Infobox
Official Website
Edits on 27 Sep, 2022
Golden AI
Infobox
Is a
Patent Jurisdiction
Patent Number
109504280
Date of Patent
March 16, 2021
0Patent Application Number
165569380
Date Filed
August 30, 2019
0Official Website
Patent Primary Examiner
Edits on 18 Jun, 2022
Golden AI
Edits made to:
Infobox (+1 properties)
Infobox
Website URL
Edits on 10 Feb, 2022
Golden AI
Edits made to:
Infobox (+7 properties)
US Patent 10950428 Method for processing a workpiece
Infobox
Is a
Patent jurisdiction
Patent number
10950428
Date of patent
March 16, 2021
Patent application number
16556938
Date Filed
August 30, 2019
Patent primary examiner
Find more entities like US Patent 10950428 Method for processing a workpiece
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
