US Patent 10957558 Methods of etching metal-containing layers
Patent 10957558 was granted and assigned to Applied Materials on March, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
March 24, 2020
0
Date of Patent
March 23, 2021
0
Patent Applicant
Patent Application Number
16828751
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Patent Citations
Patent Inventor Names
Abhijit Patil
0
Akhil Mehrotra
0
Gene Lee
0
Shan Jiang
0
Zohreh Hesabi
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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