US Patent 10957561 Gas delivery system
Patent 10957561 was granted and assigned to Lam Research on March, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
November 19, 2015
Date of Patent
March 23, 2021
Patent Applicant
Patent Application Number
14945680
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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