Patent attributes
An actuating and sensing module includes a first substrate, a second substrate, an actuating device and a sensor. The first and second substrates are stacked on each other as a gas flow channel is formed therebetween. The gas inlet, the gas flow channel and the gas outlet are in communication with each other to define a gas flow path. The actuating device is disposed in the gas outlet of the second substrate and electrically connected to a control circuit to obtain driving power. The sensor is disposed in the gas flow path and misaligned with the gas inlet. The sensor is spaced apart from the actuating device and is electrically connected to the control circuit. Being driven by the actuating device, the gas is transported from the outside into the gas flow path and monitored by the sensor.
