Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Marinus Jochemsen0
Wim Tjibbo Tel0
Hans Van Der Laan0
Stefan Hunsche0
Date of Patent
March 30, 2021
0Patent Application Number
160673030
Date Filed
December 15, 2016
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Provided is a process of selecting a measurement location, the process including: obtaining pattern data describing a pattern to be applied to substrates in a patterning process; obtaining a process characteristic measured during or following processing of a substrate, the process characteristic characterizing the processing of the substrate; determining a simulated result of the patterning process based on the pattern data and the process characteristic; and selecting a measurement location for the substrate based on the simulated result.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.