Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tsung-Sheng Kuo0
Date of Patent
March 30, 2021
0Patent Application Number
168889870
Date Filed
June 1, 2020
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A system for sending a cassette pod is provided. The system includes a processing machine having a load port for receiving the cassette pod. The system further includes a manipulating apparatus positioned above the processing machine. The manipulating apparatus includes an intermediate module having a stage and a driving mechanism connected to the stage to change the position of the stage. The manipulating apparatus further includes a conveyor module having a gripper assembly for grasping the cassette pod.
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