US Patent 10968949 Magnetic bearing control device and vacuum pump

A first arithmetic section calculates a current rotation component phase value and a current rotation component amplitude value. A second arithmetic section calculates a displacement rotation component phase value and a displacement rotation component amplitude value. A third arithmetic section calculates a ratio between the amplitude value of the current rotation frequency component and the amplitude value of the displacement rotation frequency component. Feedback control is performed such that the current rotation component phase value is equal to a value obtained by addition of a phase value of 180 degrees to the displacement rotation component phase value and that the amplitude value of the current rotation frequency component is equal to a product of the displacement rotation frequency component and the ratio.