Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Patrick Sean Finnegan0
Eric John Schindelholz0
Date of Patent
April 6, 2021
0Patent Application Number
162688060
Date Filed
February 6, 2019
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention relates to a method of fabricating an electrode array, in which an underlying handle wafer is removed to provide a planar device having the electrode array. Also provided are wafers including a plurality of planar devices having an electrode array, as well as sensors including such an electrode array.
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