Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chi-Hung Liao0
Min-Cheng Wu0
Date of Patent
April 6, 2021
0Patent Application Number
162437260
Date Filed
January 9, 2019
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method includes transferring a wafer to a position over a wafer chuck; lifting a lifting pin through the wafer chuck to the wafer; introducing a gas to a region between the wafer and the wafer chuck through a plurality of first openings on a sidewall of the lifting pin; and lowering the lifting pin until the wafer reaches the wafer chuck.
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