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US Patent 10976472 Meta-optical device and method of manufacturing the same

Patent 10976472 was granted and assigned to Samsung on April, 2021 by the United States Patent and Trademark Office.

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Patent abstract

A meta-optical device and a method of manufacturing the same are provided. The method includes depositing a group III-V compound semiconductor on a substrate, forming an anti-oxidation layer, performing crystallization by using post annealing, removing the anti-oxidation layer, and manufacturing a meta-optical device by using patterning.

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