US Patent 10976562 Nano-structured non-polarizing beamsplitter
Patent 10976562 was granted and assigned to KLA on April, 2021 by the United States Patent and Trademark Office.
Is a
Date Filed
September 21, 2018
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Date of Patent
April 13, 2021
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Patent Applicant
Patent Application Number
16138092
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Patent Citations
Patent Inventor Names
Ohad Bachar
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Andrew V. Hill
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Daria Negri
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Dmitry Gorelik
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Amnon Manassen
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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