Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sanjeev Sapra0
Ashwin Panday0
Brian J. Kerley0
Jerome A. Imonigie0
Adriel Jebin Jacob Jebaraj0
Date of Patent
April 13, 2021
0Patent Application Number
163697970
Date Filed
March 29, 2019
0Patent Citations
Patent Primary Examiner
Patent abstract
Methods, apparatuses, and systems related to forming a recess in a semiconductor structure are described. An example method includes etching the semiconductor structure using an elevated temperature dilution of acid and water. The method further includes etching the semiconductor structure using a room temperature wet etch of acid and water and a surface modification chemistry.
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