Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Seok Jung Yun0
Jee Yong Kim0
Ji Hyeon Lee0
Jung Hwan Lee0
Date of Patent
April 13, 2021
0Patent Application Number
166575200
Date Filed
October 18, 2019
0Patent Citations
Patent Primary Examiner
Patent abstract
A three-dimensional semiconductor device includes gate electrodes including pad regions sequentially lowered by a first step portion in a first direction and sequentially lowered by a second step portion in a second direction perpendicular to the first direction, the second step portion being lower than the first step portion, wherein a length of a single pad region among pad regions sequentially lowered by the second step portion in the second direction is less than a length of a remainder of the pad regions in the second direction.
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