Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
April 20, 2021
Patent Application Number
16090307
Date Filed
March 31, 2017
Patent Citations
Patent Primary Examiner
Patent abstract
A method for etching a metal surface includes a step of contacting a metal surface with a protic compound for a first time period to produce a first modified surface. The first modified surface is contacted with a protic ligand-forming compound that reacts with the first modified surface to form a volatile metal-containing compound including a metal atom and the protic ligand-forming compound. The volatile metal-containing compound is removed from the vicinity of the metal surface.
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