US Patent 10983227 On-device metrology using target decomposition
Patent 10983227 was granted and assigned to KLA-Tencor on April, 2021 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 13, 2018
Date of Patent
April 20, 2021
Patent Applicant
Patent Application Number
16101521
Patent Citations Received
Patent Inventor Names
John Hench
0
Alexander Kuznetsov
0
Antonio Arion Gellineau
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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