US Patent 10991541 Detector for detecting incident electron beam
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Patent abstract
A detector, comprising: a semiconductor substrate which detects an incident electron beam; a supporting substrate which is thicker than the semiconductor substrate and which supports the semiconductor substrate; and an insulating film layer which is provided between the semiconductor substrate and the supporting substrate, wherein at least one charge suppression film which is not electrically connected to the semiconductor substrate is formed inside the insulating film layer.
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Patent Inventor Names
Hajime Ikeda0
Masahiro Kobayashi0
Yukihiro Kuroda0
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US Patent 10991541 Detector for detecting incident electron beam
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Is a
Patent jurisdiction
Patent number
10991541
Date of patent
April 27, 2021
Patent application number
16716668
Date Filed
December 17, 2019
Patent citations
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