US Patent 10995779 Hydraulically amplified self-healing electrostatic actuators

Hydraulically-amplified, self-healing, electrostatic actuators that harness electrostatic and hydraulic forces to achieve various actuation modes. Electrostatic forces between electrode pairs of the actuators generated upon application of a voltage to the electrode pairs draws the electrodes in each pair towards each other to displace a liquid dielectric contained within an enclosed internal cavity of the actuators to drive actuation in various manners. The electrodes and the liquid dielectric form a self-healing capacitor whereby the liquid dielectric automatically fills breaches in the liquid dielectric resulting from dielectric breakdown.