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US Patent 10998426 Semiconductor device and manufacturing method thereof
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Patent
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Date Filed
April 26, 2019
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Date of Patent
May 4, 2021
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Patent Application Number
16396405
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Patent Citations
US Patent 10355102 Semiconductor device and method of manufacturing the same
US Patent 10263100 Buffer regions for blocking unwanted diffusion in nanosheet transistors
US Patent 10714592 Method of manufacturing a semiconductor device and a semiconductor device
US Patent 10164012 Semiconductor device and manufacturing method thereof
US Patent 10211307 Methods of manufacturing inner spacers in a gate-all-around (GAA) FET through multi-layer spacer replacement
Patent Inventor Names
Tzu-Chiang Chen
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Chao-Ching Cheng
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Hung-Li Chiang
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I-Sheng Chen
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
10998426
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Patent Primary Examiner
Hsien-Ming Lee
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