Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
May 11, 2021
Patent Application Number
16414571
Date Filed
May 16, 2019
Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
Heights of wafers in a front opening unified pod are identified by using an end effector and a front sensor arranged thereon, such that the end effector can be positioned at the appropriate height when retrieving one of the wafers, so as to avoid colliding with a wafer stored inside the front opening unified pod. Wafer backside properties can also be detected by the end effector, so as to report defects and contaminants on the wafer.
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