Patent 11009449 was granted and assigned to FEI Company on May, 2021 by the United States Patent and Trademark Office.
Apparatuses and methods for implementing scanning trajectories for ROI tomography are disclosed herein. An example method includes determining a first focus object distance based on a circumradius of a sample, the sample including a region of interest, determining a second focus object distance based on a radius of a smallest cylinder that contains the region of interest, determining a plurality of viewing angles from a plurality of possible viewing angles in response to the first focus object distance, where each viewing angle of the plurality of viewing angles has an associated focus object distance measured from the region of interest, and where the associated focus object distance of each of the plurality of viewing angles is less than the first focus object distance and greater than the second focus object distance, and scanning the region of interest using at least the plurality of viewing angles.