US Patent 11009614 Semiconductor X-ray detector

Disclosed herein is an apparatus suitable for detecting X-ray, comprising: an X-ray absorption layer comprising an electrode; an electronics layer, the electronics layer comprising: a substrate having a first surface and a second surface, an electronics system in or on the substrate, an electric contact on the first surface, and a first via extending from the first surface toward the second surface; wherein the electrode is electrically connected to the electric contact; wherein the electronics system comprises a controller connected in series with and between the electric contact and the first via.