Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Dror Shemesh0
Adi Boehm0
Eugene T. Bullock0
Gurjeet Singh0
Date of Patent
June 1, 2021
0Patent Application Number
164059200
Date Filed
May 7, 2019
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A method for determining a defect material element, the method includes (a) acquiring, by a charged particle beam system and by applying a spectroscopy process, an electromagnetic emission spectrum of a part of a defect; (b) acquiring, by the charged particle beam system, a backscattered electron (BSE) image of an area that includes the defect; and (c) determining a defect material element. The determining of the defect material element includes: determining whether an ambiguity exists in the electromagnetic emission spectrum, and resolving the ambiguity based on the BSE image, when it is determined that the ambiguity exists.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.