Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hung-Wei Liu0
Anish A. Khandekar0
Jeffery B. Hull0
Sameer Chhajed0
Date of Patent
June 1, 2021
0Patent Application Number
165365900
Date Filed
August 9, 2019
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A transistor comprises a top source/drain region, a bottom source/drain region, a channel region vertically between the top and bottom source/drain regions, and a gate operatively laterally-adjacent the channel region. At least one of the top source/drain region, the bottom source/drain region, and the channel region are crystalline. All crystal grains within the at least one of the top source/drain region, the bottom source/drain region, and the channel region have average crystal sizes within 0.064 μm3 of one another. Other embodiments, including methods, are disclosed.
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