Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Phillip Mather0
Renu Whig0
Sanjeev Aggarwal0
Jon Slaughter0
Kenneth Smith0
Nicholas Rizzo0
Date of Patent
June 1, 2021
0Patent Application Number
163600990
Date Filed
March 21, 2019
0Patent Citations
Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a “Z” axis magnetic field onto sensors orientated in the XY plane.
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